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Concept information

Preferred term

ion beam projection lithography  

Entry terms

  • ion projection lithography
  • IPL
  • projection ion lithography

Note

  • ion beam projection lithography

In other languages

URI

https://vocabs.ilc4clarin.ilc.cnr.it/vocabularies/realiter/pl_20_500_11752_OPEN_1022/lithographie_par_projection_d_ions

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